On Chip RF Passives Using an Su-8 Composite with Magnetic Nanoparticles

Abstract

A novel process employing a mixture of Su-8 negative photoresist and surfactant coated magnetic nanoparticles is demonstrated. Magnetic nanoparticles increase the permeability of Su-8. Coplanar waveguide samples are fabricated by using of nanoparticles with associated fabrication process and characterized. Magnetic composite material results demonstrated a higher propagation constant without any visible eddy current losses that are generally associated with high permeability materials.