Dynamic Behaviour of a Novel Compliant MEMS Force Amplifier by MATLAB/SIMULINK

Abstract

High force amplification in micro-scale can be achieved by MEMS compliant systems and such systems have been recently preferred to obtain high output forces in micro actuators due to its monolithic structure and ease of fabrication. We studied the mechanism of novel MEMS force amplifier in dynamic mode by modeling its rigid body mechanism with Matlab/Simulink programming. Kinematic analysis and dynamic response of the MEMS compliant system was obtained by modeling of velocity and acceleration parameters, and ramp input function, respectively. We found that the output force goes to infinity at zero-crank angle and there is 2650 times force amplification by a given very small crank rotation about 2.30.