Atomic Hydrogen Production and Modelling Revisited

Abstract

In this study the microwave discharge technique for atomic hydrogen production is reviewed starting with the earlier work of Wood in 1921 uptill the extensive electrical discharge era of 1970’s. The evaluation is completed with the recent studies which concentrated on atomic hydrogen utilization in semiconductor manufacturing, thin film formation, surface treatment and modification, nano particle formation, sintering and hydropyrolysis of hydrocarbons.