Preparation of high quality Al TEM specimens via a double-jet electropolishing technique

Abstract

Obtaining clean, uniformly thin and high-quality TEM specimens entails a great deal of work that has a number of parameters that have to be considered carefully depending on specimen preparation technique(s). The parameters, such as voltage, current density, temperature, time, electrolyte, and electrolyte flow rate, have the most significant importance in a double-jet electropolishing technique. Useful hints to have the least failures in preparing TEM specimens and optimum values of the above parameters for pure Al are given and discussed.