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Noncontact lateral-force gradient measurement on Si(111)-7×7 surface with small-amplitude off-resonance atomic force microscopy

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American Vacuum Society

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Abstract

In this work, the authors report on a quantitative investigation of lateral-force gradient and lateral force between a tungsten tip and Si(111)-(7×7) surface using combined noncontact lateral-force microscopy and scanning tunneling microscopy. Simultaneous lateral-force gradient and scanning tunneling microscopy images of single and multiatomic step are obtained. In our measurement, tunnel current is used as feedback. The lateral-stiffness contrast has been observed to be 2.5N∕m at a single atomic step, in contrast to 13N∕m at a multiatomic step on Si (111) surface. They also carried out a series of lateral stiffness-distance spectroscopy, which show a sharp increase in tip-surface interaction stiffness as the sample is approached toward the surface.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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1071-1023

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OPEN

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Silicon, Tungsten tips, Tip-surface interactions, Atomic forces, Lateral forces, Tungsten, Atomic steps, Si (1 1 1), Stiffness, Force gradients, QC Physics, Tunnel currents, Lateral-force microscopies, Lateral stiffness, Scanning, Off resonances, Sharp increase, Noncontact, Scanning tunneling microscopy, Quantitative investigations

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