Fabrication Method of Mems Based Clamped-Clamped Resonant Magnetometer

Abstract

In this paper we present fabrication steps for manufacturing MEMS based magnetometer which is actuated by Lorentz force in the middle point of beam which has been fixed from both two edges (Clamped - Clamped). We utilized two different process sequences in order to fabricate microsystems properly. The structures were first fabricated on bulk Si-wafer and the fabrication of these sensors was characterized by built in stress in the beam and etching methods in the processes. The second approach was performed on SOI Si-wafer. Two fabrication routes are compared in terms of working MEMS structures. The microstructures are manufactured successfully by a process sequence based on SOI-Si wafer.