A 3D-printed 3D actuator for miniaturized laser scanning probes

Abstract

Abstract Imaging of tissue sections at multiple depths with a miniaturized optical imaging probe necessitates 3D actuation capability. A number of MEMS studies in literature have addressed 3D actuation either through a single scanning unit with three degrees of freedom, or combination of multiple scanning units each having one or more degrees of freedom in scanning. Such microsystems are manufactured with high fabrication complexity while only offering a limited (typically